Pfupiso yePhotoresist
Photoresist, inozivikanwawo sephotoresist, inoreva chinhu chakatetepa chine firimu chinoshanduka kunyungudika kana chaiswa pachiedza cheUV, maerekitironi, maion beams, maX-rays, kana mamwe marara.
Inoumbwa ne resin, photoinitiator, solvent, monomer, nezvimwe zvinowedzera (ona Tafura 1). Photoresist resin uye photoinitiator ndizvo zvinhu zvinonyanya kukosha zvinokanganisa mashandiro e photoresist. Inoshandiswa sekudzivirira ngura panguva ye photolithography.
Pakugadzirisa nzvimbo dze semiconductor, kushandisa photoresist inosarudzwa zvakanaka kunogona kugadzira mufananidzo waunoda pamusoro.
Tafura 1.
| Zvimisikidzo zvePhotoresist | Kushanda |
| Chinonyungudutsa | Inoita kuti photoresist ive inonyorova uye inoshanduka-shanduka, uye haina kana simba pahunhu hwemakemikari ephotoresist. |
| Mugadziri wemifananidzo | Inozivikanwawo se photosensitizer kana kuti photocuring agent, ndiyo chinhu chinodzivirira kupenya kwechiedza muzvinhu zvinodzivirira kupenya kwechiedza. Imhando yemusanganiswa unogona kuora kuita ma free radicals kana ma cations uye kutanga makemikari anobatanidza ma monomers mushure mekunwa ultraviolet kana simba rechiedza rinoonekwa reimwe wavelength. |
| Resin | Iine mapolymer asina simba, uye inoshanda sezvisungo zvekubatanidza zvinhu zvakasiyana-siyana mu photoresist pamwe chete, zvichipa photoresist hunhu hwayo hwemakanika uye hwemakemikari. |
| Monomer | Inozivikanwawo se active diluents, mamorekuru madiki ane mapoka anoshanda anogona kuumbwa uye mamorekuru ane huremu hwakaderera anogona kutora chikamu mukuita kwepolymerization kuti agadzire maresini ane huremu hwakawanda. |
| Chinowedzera | Inoshandiswa kudzora hunhu hwemakemikari chaiwo evanogadzira ma photoresist. |
Vagadziri vemafoto vanopatsanurwa muzvikamu zviviri zvikuru zvichienderana nemufananidzo wavanoumba: wakanaka newakaipa. Munguva yekushandiswa kwephotoresist, mushure mekuratidzwa nekugadzirwa, zvikamu zvakaratidzwa zvependi zvinonyungudika, zvichisiya zvikamu zvisina kuratidzwa. Pendi iyi inoonekwa seyakanaka yephotoresist. Kana zvikamu zvakaratidzwa zvikaramba zviripo nepo zvikamu zvisina kuratidzwa zvichinyungudika, pendi yacho inoonekwa seyakaipa yephotoresist. Zvichienderana nekwakabva chiedza uye kwakabva mwaranzi, vagadziri vemafoto vanoiswa muzvikamu zveUV (kusanganisira vagadziri vemafotoresist veUV vane kunaka newakaipa), vagadziri vemafotoresist veUV (DUV), vagadziri vemafotoresist veX-ray, vagadziri vemafotoresist veelectron beam, uye vagadziri vemafotoresist veion beam.
Photoresist inonyanya kushandiswa mukugadzirisa mapatani akacheneswa mumapaneru ekuratidzira, maseketi akabatanidzwa, uye zvishandiso zve semiconductor zvakasiyana. Tekinoroji yekugadzira photoresist yakaoma, ine mhando dzakasiyana dzezvigadzirwa uye zvirevo. Kugadzirwa kwemaseketi akabatanidzwa muindasitiri yemagetsi kunoisa zvinodiwa zvakanyanya paphotoresist inoshandiswa.
Ever Ray, mugadziri ane ruzivo rwemakore makumi maviri anonyanya kugadzira nekugadzira maresini anorapika, ane kugona kugadzira matani zviuru makumi maviri pagore, chigadzirwa chakakwana, uye kugona kugadzirisa zvigadzirwa. Mukuchengetedza mifananidzo, Ever Ray ine resini ye17501 sechikamu chikuru.
